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Ultrasonic/megasonic detergent for electronics and semiconductor:
VECTOR HTC-SCA Series are water-based detergents formulated to increase the cavitational energy released upon the substrate surface by ultrasonic or megasonic apparatus. The products are designed for more effective cleaning of post-lapped, post-etched and post-polished substrates. Used at economical dilution ratios,VECTOR HTC-SCA Series will remove light organics, polymers and sub-micron particles typically found on the surface of semiconductor materials. These contaminants are often the cause of wafer staining and streaking upon examination after etch.

VECTOR HTC-SCA Series detergents are recommended for pre-cleaning and final cleaning stages of solar silicon production lines, wherever ultrasonic cleaning is applied. These products will remove organic and inorganic contamination and particles from both mono-crystalline and multicrystalline silicon. VECTOR HTC-SCA Series can be used in heated or unheated ultrasonic tanks and are also recommended for brush and dip tank applications.


  • Highly economical.
  • Superior wetting ability.
  • Free rinsing - leaves no film or residue.
  • Fully compatible with other VECTOR products.


For more detailed information, download our datasheet:

Interested in our cleaning and rinsing products?


We are happy to share our knowledge with you and remain at your disposal for any further questions.

Adam Nielsen

Product Manager Cleaning and Rinsing