Aggresive aluminum oxide slurry designed for patterned media:
The ULTRA-SOL® A20 polishing slurry has been formulated to provide aggressive removal rates on different types of metal. This slurry performs well in processes where multiple alloys must be polished on within same layer simultaneously. It has been used successfully on materials containing copper, iron, tungsten, cobalt, nickel, and aluminum oxide. The slurry provides both fine finish and good removal rates for both the metallic alloy and alumina overcoat, while minimizing detrimental effects of corrosion.