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Aluminum oxide slurry

Aggresive aluminum oxide slurry designed for patterned media:
The ULTRA-SOL® A20 polishing slurry has been formulated to provide aggressive removal rates on different types of metal. This slurry performs well in processes where multiple alloys must be polished on within same layer simultaneously. It has been used successfully on materials containing copper, iron, tungsten, cobalt, nickel, and aluminum oxide. The slurry provides both fine finish and good removal rates for both the metallic alloy and alumina overcoat, while minimizing detrimental effects of corrosion.

The A20 provides high yields, good planarity, and high Ti removal rates. It also minimizes oxide erosion, plug recesses, and dishing. The ULTRA-SOL® A20 is highly selective to oxide (20:1), while providing even removal on tin and titanium.


Base material  Aluminum oxide

Shelf life  12 months

Packaging  Product is typically available in 1-gallon jugs, 5-gallon pails, and 55-gallon drums. In some cases alternative packaging sizes may be available upon request.

Applications  Nickel, tungsten

Similar products

  Ultra-Sol A18 Ultra-Sol A19 Ultra-Sol A20 Ultra-Sol KJ65B Ultra-Sol A15
Base material Aluminum oxide Aluminum oxide Aluminum oxide Aluminum oxide Aluminum oxide
Particle size (µm) 0.24 0.24 0.24 0.24 0.24
pH 4.0 4.0 4.1 5.6 5.6
Solids content 16.3 11.2 16.3 15 15.3
Specific gravity 1.09 1.05 1.09 1.09 1.08


For more detailed information, download our datasheet:

Interested in our aluminum oxide slurries and powders?


We are happy to share our knowledge with you and remain at your disposal for any further questions.

Adam Nielsen

Product Manager Aluminum Oxide Slurries