Standard colloidal silica featuring ultra controlled particle distribution:
ULTRA-SOL® 3EX’s proprietary, neutral pH formulation makes it a unique and flexible slurry for many applications. The 70nm particle at 30% solids provides excellent removal rates and high quality surface finishes, while the neutral pH is ideal for polishing applications where corrosion or static etch rates are of concern. Furthermore, the 3EX is manufactured with high purity raw materials, providing low levels of sodium and other ion contaminants, such as metals and chlorides, in the end product. The consistent colloidal silica particles in the ULTRA-SOL® 3EX are easily dispersed, pumped, and filtered in all types of slurry distribution systems. With it’s uniform particle size distribution, neutral pH, and robustness in manufacturing environments, ULTRA-SOL® 3EX is an excellent choice for pH sensitive environments.