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DIAGRID™

Pad conditioner

Ideal for improving pad life and process consistency: DIAGRID™ pad conditioners incorporate many of the best features available in pad conditioning technology, making them ideal for the demands of today’s complex CMP processes. The product consists of a stainless steel base, overlaid with brazed diamonds arranged in a grid pattern that provides superior control of diamond spacing, height and size. A robust, chemically enhanced braze holds the diamonds firmly in place with a chemical bond that is extremely resistant to diamond loss. The entire surface is covered with the DIASHIELD® PVD diamond overcoat which offers superior chemical resistance, ideal for use in tungsten and copper processes.

Highlights

  • Superior diamond placement control.
  • Superior uniformity of diamond height.
  • Robust brazed matrix.
  • DIASHIELD® PVD diamond overcoat.
  • Stringent QC inspection on every pad conditioner.
  • Factory high pressure pre-conditioning procedure.

Details

Base material  Diamond

Shelf life  No expiration

Packaging  DIAGRID™ pad conditioners are packaged in plastic trays and vaccum sealed in cleanroom-grade plastic.

DIAGRID™ is a registered trademark of Kinik. Pureon is an authorized distributor for Kinik.

Interested in our polishing pads for advanced materials?

 

We are happy to share our knowledge with you and remain at your disposal for any further questions.

Adam Nielsen

Product Manager Polishing Pads for Advanced Materials