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SUBA™ 1200

Felt polishing pad

SUBA™ polishing pads are polyurethane impregnated polyester felts. They are specifically designed for stock and intermediate polishing where achieving a high precision surface is critical. SUBA™ pads should be used in combination with each other and with final polishing pads to produce a haze-free, low defect finish in dual or multi-step processes. SUBA™ pads are ideal for a wide variety of materials including semiconductor wafers, glass, ceramics, specialmetals and plastic.


Note: Product has been discontinued and replaced with SUBA™ 800.

SUBA™ 1200 and 1250 are the newest SUBA™ pads and provide improved overall flatness and site-flatness for prime wafer manufacturing processes. These pads are specifically designed to reduce pad glazing and improve process control.


Base material  Felt

Shelf life  12 months

Packaging  Pads are packaged face-to-face (polish side to polish side) and sealed inside a plastic bag to ensure cleanliness during transportation. The bags are taped to the side of the box to prevent the bag from slipping and damaging the pads. Pads should always remain flat. Bending pads during handling can cause wrinkles in the PSA and premature delamination of the release liner.

Applications  Cadmium zinc telluride, lithium niobate, lithium tantalate, silicon carbide

Similar products

  SUBA™ 500 SUBA™ H2 SUBA™ 1200 SUBA™ 600 SUBA™ 800
Base material Felt Felt Felt Felt Felt
Compress ibility % 13 12.25 6 4 4
Hardness 55 67 80 80 82
Hardness test Shore D Shore D Shore D Asker C Asker C
Thickness (mils) 50 50 50 50 50

The data presented is a statistical representation for comparison purposes. The values are not necessarily a representation of the COA specifications.

SUBA™ is a registered trademark of DuPont. Pureon is an authorized distributor for DuPont.


For more detailed information, download our datasheet:

Interested in our polishing pads for advanced materials?


We are happy to share our knowledge with you and remain at your disposal for any further questions.

Adam Nielsen

Product Manager Polishing Pads for Advanced Materials