PURE-DS-RT suspensions are fully water-soluble but do not dry when exposed to air. The excellent lubrication properties of PURE-DS-RT allow for high lapping pressures and thus high removal rates.
PURE-DS-RT suspensions are ideal for Rapid Thinning of SiC wafers and of hard materials (e.g. sapphire).
Type | Workpiece type | Workpiece size | Plate type | Application |
---|---|---|---|---|
PURE-DS-RT-1 | SiC (4H-N) | 150 mm, 200 mm | IRINO-PROSiC | SiC Rapid Thinning, High-Performance |
PURE-DS-RT-2 | SiC (4H-N) | 150 mm, 200 mm | IRINO-PROSiC | SiC Rapid Thinning, High-Quality |
PURE-DS-RT-3 | Sapphire, A-plane, C-plane | 30 mm, 50 mm | IRINO-PRO-H | Sapphire Rapid Thinning, High-Performance |
PURE-DS-RT-4 | Sapphire, A-plane, C-plane | 30 mm, 50 mm | IRINO-PRO-M | Sapphire Rapid Thinning, High-Quality |
PURE-DS-RT-5 | Ferrous metals | 25 mm, 40 mm, 50 mm | IRINO-PLUS-H | Ferrous metal, Rapid Thinning High-Performance |
PURE-DS-RT-6 | Ferrous metals | 25 mm, 40 mm, 50 mm | IRINO-PLUS-M | Ferrous metal, Rapid Thinning High-Quality |
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