VECTOR HTC-SCA series are water-based detergents formulated to increase the cavitational energy released upon the substrate surface by ultrasonic or megasonic apparatus. The products are designed for more effective cleaning of post-lapped, post-etched, and post-polished substrates. Used at economical dilution ratios, VECTOR HTC-SCA series will remove light organics, polymers, and sub-micron particles typically found on the surface of semiconductor materials. These contaminants are often the cause of wafer staining and streaking upon examination after etch.
VECTOR HTC-SCA series detergents are recommended for pre-cleaning and final cleaning stages of solar silicon production lines, wherever ultrasonic cleaning is applied. These products will remove organic and inorganic contamination and particles from both mono-crystalline and multi-crystalline silicon. VECTOR HTC-SCA series can be used in heated or unheated ultrasonic tanks, and are also recommended for brush and dip tank applications.