The ULTRA-SOL® patterned media slurries have been formulated to provide aggressive removal rates on different types of metal. They
perform well in processes where multiple alloys must be polished on within same layer simultaneously. They have been used successfully
on materials containing copper, iron, tungsten, cobalt, nickel, and aluminum oxide. The slurries provide both fine finish and good removal
rates for both the metallic alloy and alumina overcoat, while minimizing detrimental effects of corrosion.
The ULTRA-SOL® patterned media slurries provide high yields, good planarity, and high Ti removal rates. They also minimize oxide
erosion, plug recesses, and dishing. ULTRA-SOL® patterned media slurries are highly selective to oxide (20:1), while providing even
removal on Tin and titanium.