Ideal for improving pad life and process consistency: DIAGRID™ pad conditioners incorporate many of the best features available in pad
conditioning technology, making them ideal for the demands of today’s complex CMP processes.

The product consists of a stainless steel base, overlaid with brazed diamonds arranged in a grid pattern that provides superior control of
diamond spacing, height and size. A robust, chemically enhanced braze holds the diamonds firmly in place with a chemical bond that is
extremely resistant to diamond loss.

The entire surface is covered with the DIASHIELD® PVD diamond overcoat which offers superior chemical resistance, ideal for use in
tungsten and copper processes.