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OPTIVISION™
Poromeric polishing pad
The OPTIVISION™ pad is the newest generation of buffing pads used in the final polishing step. The OPTIVISION™ 4540 has a dual pore structure; a combination of small pores dispersed amongst larger pores. This pore structure is advantageous over other finishing pads due to the increased number of contact points. The increase in contact area and number of contact points results in lower defectivity, increased removal rate, and improved surface finish.
Details
Base material Poromeric
Shelf life 12 months
Packaging Pads are packaged face-to-face (polish side to polish side) and sealed inside a plastic bag to ensure cleanliness during transportation. The bags are taped to the side of the box to prevent the bag from slipping and damaging the pads. Pads should always remain flat. Bending pads during handling can cause wrinkles in the PSA and premature delamination of the release liner.
Applications Copper CMP, fused silica, germanium, TEOS
Similar products
OPTIVISION™ | POLITEX™ | POLITEX™ Hi | POLITEX™ Reg Embossed | |
---|---|---|---|---|
Base material | Poromeric | Poromeric | Poromeric | Poromeric |
Compress ibility % | 12.00 | 14.75 | 13.75 | 14.75 |
Thickness (mils) | 56 | 56 | 60 | 56 |
The data presented is a statistical representation for comparison purposes. The values are not necessarily a representation of the COA specifications.
OPTIVISION™ is a registered trademark of DuPont. Pureon is an authorized distributor for DuPont.
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For more detailed information, download our datasheet:
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