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Felt polishing pad

SUBA™ polishing pads are polyurethane impregnated polyester felts. They are specifically designed for stock and intermediate polishing where achieving a high precision surface is critical. SUBA™ pads should be used in combination with each other and with final polishing pads to produce a haze-free, low defect finish in dual or multi-step processes. SUBA™ pads are ideal for a wide variety of materials including semiconductor wafers, glass, ceramics, special metals and plastic.

SUBA™ IV features an open pore structure and a less aggressive urethane composition than the other SUBA™ pads. These qualities make it an ideal primary polishing pad for low to medium pressure applications with fragile crystals or delicate surfaces. SUBA™ IV is often used as a base pad in semiconductor applications for the IC1000™ series products.


Base material  Felt

Shelf life  12 months

Packaging  Pads are packaged face-to-face (polish side to polish side) and sealed inside a plastic bag to ensure cleanliness during transportation. The bags are taped to the side of the box to prevent the bag from slipping and damaging the pads. Pads should always remain flat. Bending pads during handling can cause wrinkles in the PSA and premature delamination of the release liner.

Applications  Calcium fluoride, gallium arsenide, gallium nitride, germanium, glass, silicon

Similar products

  SUBA™ IV SUBA™ IV Perforated SUBA™ IV .150 SUBA™ IV Embossed GS Polishing Pad 0.150"
Base material Felt Felt Felt Felt Felt
Compress ibility % 13.5 13.5 6 13.5 5
Hardness 44 44 44 44 45
Hardness test Shore D Shore D Shore D Shore D Shore D
Thickness (mils) 50 50 150 50 150

The data presented is a statistical representation for comparison purposes. The values are not necessarily a representation of the COA specifications.

SUBA™ is a registered trademark of DuPont. Pureon is an authorized distributor for DuPont.


For more detailed information, download our datasheet:

Interested in our polishing pads for advanced materials?


We are happy to share our knowledge with you and remain at your disposal for any further questions.

Adam Nielsen

Product Manager Polishing Pads for Advanced Materials