Polishing Pads


Polyurethane impregnated
felt pad, non-woven

SUBA™ polishing pads are polyurethane impregnated polyester felts. They are speci􀉾ically designed for stock and intermediate polishing where achieving a high precision surface is critical. SUBA™ pads should be used in combination with each other and with 􀉾inal polishing pads to produce a haze-free, low defect 􀉾inish in dual or multi-step processes. SUBA™ pads are ideal for a w ide variety of materials including semiconductor wafers, glass, ceramics, special metals and plastic. SUBA™ IV features an open pore structure and a l ess aggressive urethane composition than the other SUBA™ pads. These qualities make it an ideal primary polishing pad for low to medium pressure applications with fragile crystals or delicate surfaces.


Available in a variety of surface textures such as grooved, embossed, plain, and perforated

Product Specifications

Base material


Shelf life

12 months

Slurry additive Base material Compressibility [%] Hardness Hardness Test Thickness [mils]
SUBA™ 550 Felt 13.00 55 Shore D 50
SUBA™ 600 Felt 4.00 44 Asker C 50
SUBA™ 800 Felt 4.00 82 Asker C 50
SUBA™ X Felt 13.25 44 Shore D 50
SUBA™ IV Felt 13.50 44 Shore D 50
SUBA™ IV.150 Felt 13.50 44 Shore D 150
GS polishing pad Felt 5.00 45 Shore D 150

Interested in our
SUBA™ IV Polishing Pad?

We are happy to share our knowledge with you
and remain at your disposal for any further questions.

Adam Nielsen