SUBA™ polishing pads are polyurethane impregnated polyester felts. They are
specifically designed for stock and intermediate polishing where achieving a
high precision surface is critical. SUBA™ pads should be used in combination
with each other and with final polishing pads to produce a haze-free, low defect
finish in dual or multi-step processes. SUBA™ pads are ideal for a w ide variety
of materials including semiconductor wafers, glass, ceramics, special metals
and plastic. SUBA™ X is a denser, harder pad with smaller pore structure than
the SUBA™ IV pad. It is often used for polishing glass, quartz or ceramics with
consistent, reproducible results.