Developed as an alternative to the original DF200 material, the PF800 is an
advanced new standard with application in many industries, including semiconductor,
optics, and specialty substrates. The PF800 is a poromeric film
buffed such that it has an open, tube-like pore structure. This structure
compresses to absorb flatness variations on both the back-side of the wafer,
as well as the polishing head itself. In addition, it will rebound to its original
thickness over a long period of time, producing grater flatness throughout the
lifetime of the film. Finally, the film features superior flatness results when
used in a template, as wafers held in place by water tension are still able to
rotate within the pocket.
When used as a final polishing pad, the PF800 construction quality yields
excellent surface finish, lifetime, and flatness.
PF800 is also commonly used as gasket material or a carrier film. It is easily
cut to any size, and laser-cut vacuum holes may also be implemented.