Polishing Pads

SUBA™ 600

Polyurethane impregnated
felt pad, non-woven

SUBA™ polishing pads are polyurethane impregnated polyester felts. They are specifically designed for stock and intermediate polishing where achieving a high precision surface is critical. SUBA™ pads should be used in combination with each other and with 􀉾inal polishing pads to produce a haze-free, low defect 􀉾inish in dual or multi-step processes. SUBA™ pads are ideal for a w ide variety of materials including semiconductor wafers, glass, ceramics, special metals and plastic.


surface textures such as grooved, embossed, plain, and perforated

Product Specifications

Base material


Shelf life

12 months

Slurry additive Base material Compressibility [%] Hardness Hardness Test Thickness [mils]
SUBA™ 550 Felt 13.00 55 Shore D 50
SUBA™ 600 Felt 4.00 44 Asker C 50
SUBA™ 800 Felt 4.00 82 Asker C 50
SUBA™ X Felt 13.25 44 Shore D 50
SUBA™ IV Felt 13.50 44 Shore D 50
SUBA™ IV.150 Felt 13.50 44 Shore D 150
GS polishing pad Felt 5.00 45 Shore D 150

Interested in our
SUBA™ 600 Polishing Pad?

We are happy to share our knowledge with you
and remain at your disposal for any further questions.

Adam Nielsen